…It plays an important role in the manufacture of semiconductor integrated circuits, and is a central technology in the development from LSI to VLSI. The technology in this field is called microlithography. As VLSI becomes more highly integrated, the elements become smaller and smaller. To achieve processing accuracy on the order of μm to 0.1 μm, the light used for exposure has changed from ultraviolet to far ultraviolet, and even to X-rays and short wavelengths, or charged particles such as electron beams and ion beams. … *Some of the terminology that mentions "microlithography" is listed below. Source | Heibonsha World Encyclopedia 2nd Edition | Information |
…なかでも半導体集積回路の製造に関しては重要な役割を果たしており,LSIから超LSIへの発展の中心的な技術となっている。この分野の技術はマイクロリソグラフィーmicro lithographyと称されている。超LSIの高集積化が進むとともに素子の微細化も著しく,μmから0.1μmのオーダーの加工精度を得るために,露光する光として紫外光から遠紫外線,さらにはX線と短波長を,または電子ビームやイオンビームのような荷電粒子を用いるようになってきている。… ※「micro lithography」について言及している用語解説の一部を掲載しています。 出典|株式会社平凡社世界大百科事典 第2版について | 情報 |
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