A general term for precision processing techniques that use photographic techniques. It has long been used as a photomechanical printing technique, but around 1960, it began to attract attention as a new processing technique when it began to be used to manufacture shadow masks for color televisions and masks for mesa transistors. Today, it has become an indispensable technology, especially in the field of electronics, and is used widely in various fields. The process involves placing a photosensitive photoresist layer on a substrate, exposing the pattern from a photographic master, dissolving and removing all but the required parts, and then fine processing is performed by etching or plating (the former is called photoetching, the latter photoelectroforming). Source: Heibonsha World Encyclopedia, 2nd Edition Information |
写真的技法を用いた精密加工技術の総称。印刷の写真製版技法として古くから利用されていたが,1960年ころ,カラーテレビジョンに用いるシャドーマスクやメサ型トランジスター用のマスクなどの製造に利用されるようになってから新しい加工技術として注目を集めるようになった。現在ではとくにエレクトロニクスの分野では欠かすことのできない技術となり,各分野で広範囲に利用されている。 工程としては基板上に感光性をもつフォトレジスト層を設け,写真原版よりパターンを露光,必要部分を残して溶解除去し,エッチングまたはめっき方法により微細加工する(前者をフォトエッチング,後者をフォトエレクトロフォーミングという)。
出典 株式会社平凡社世界大百科事典 第2版について 情報 |
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