It is made of a transparent glass plate, one side of which is finished to a particularly precise flat surface. It is used to measure flatness by applying the interference of light. The precision of the surface is usually evaluated by the Newton rings formed between the plate and a reference surface, and the maximum deviation from flatness is about 0.05 to 0.3 μm, but recently high-precision plates with a deviation of about 0.005 μm have been made. Transparent glass plates with both sides made flat and parallel are called optical parallels, and are used to measure flatness and parallelism by the interference of light. Source: Heibonsha World Encyclopedia, 2nd Edition Information |
透明ガラス板で作られ,その片面がとくに精度のよい平面に仕上げられたものをいう。光の干渉を応用して平面度の測定に用いられる。面の精度はふつう基準面との間に作られるニュートンリングで評価され,平面からの外れの最大値は0.05~0.3μm程度であるが,最近は0.005μm程度の高精度のものも作られている。透明ガラス板の両面が平面かつ平行に作られたものはオプティカルパラレルoptical parallelと呼ばれ,光の干渉による平面度,平行度の測定に用いられる。
出典 株式会社平凡社世界大百科事典 第2版について 情報 |
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