...The irradiation system consists of three stages of focusing lenses (condenser lenses), and a very thin electron beam of 2 nm can be obtained on the sample surface in transmission mode. The imaging system consists of six stages, and the magnification can be changed over a wide range from 50 times to 1 million times, with a resolution of 0.14 nm. (2) Scanning Electron Microscopes There are various types of scanning electron microscopes: the popular scanning electron microscope, the X-ray microanalyzer equipped with an X-ray spectrometer, the field emission scanning electron microscope for observing ultra-high resolution images, and the Auger and ESCA for analyzing only the very surface layer of a sample. The electron gun is located at the top of the scanning electron microscope's tube, and below that is the focusing lens that narrows the electron beam, and below that is the objective lens. ... *Some of the terminology that mentions "ESCA" is listed below. Source | Heibonsha World Encyclopedia 2nd Edition | Information |
…照射系は3段の集束レンズ(コンデンサーレンズ)よりなり,試料面上で2nmの非常に細い電子線束が透過モードで得られ,結像系は6段よりなり,倍率は50倍から100万倍と広範囲に可変でき,分解能は0.14nmである。(2)走査形電子顕微鏡 走査形電子顕微鏡には,普及形走査電子顕微鏡,X線分光器を備えたX線マイクロアナライザー超高分解能像観察用の電界放射形走査電子顕微鏡,また試料のごく表面層のみの分析用にオージエ,ESCAがある。走査形電子顕微鏡の鏡筒上部には電子銃が位置し,その下に電子線の束を細くする集束レンズが,そしてその下に対物レンズがある。… ※「ESCA」について言及している用語解説の一部を掲載しています。 出典|株式会社平凡社世界大百科事典 第2版について | 情報 |
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