A type of IC in which circuit elements and their interconnections are made in the form of a film on an insulating substrate other than a semiconductor. They are broadly divided into thin film (1 μm or less) integrated circuits and thick film (1-10 μm) integrated circuits. Thin film is made by vacuum deposition or ion sputtering, while thick film is made by applying and baking an ink-like paste. Thin film allows for more precise passive elements than thick film, but is less suitable for mass production. The performance of these passive elements is superior to that of semiconductor integrated circuits, but because active elements are difficult to manufacture, they are put to practical use as hybrid ICs. → Related topics Thick film IC | Thin film IC Source : Heibonsha Encyclopedia About MyPedia Information |
ICの一種で,半導体以外の絶縁基板上に回路素子とその相互接続が膜状に作られるもの。薄膜(はくまく)(1μm以下)集積回路と厚膜(あつまく)(1〜10μm)集積回路に大別。薄膜は真空蒸着やイオンスパッタリング等により作られ,厚膜はインキ状ペーストを塗布し焼きつけたもの。薄膜は厚膜より高精度の受動素子が得られるが量産性は劣る。これらは半導体集積回路に比べ受動素子の性能はすぐれるが,能動素子の製造が困難なため,ハイブリッドICとして実用化されている。 →関連項目厚膜IC|薄膜IC 出典 株式会社平凡社百科事典マイペディアについて 情報 |
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